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AW-105R Plasma Asher Plasma Descum

离岸价格

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国:

USA

モデル番号:

AW-105R Plasma Asher Plasma Descum

离岸价格:

（交渉可能） Get Latest Price

ロケーション:

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最低注文量:

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Allwin21 Corp.

USA

無料会員

連絡先担当者 Mr. Peter

220 Cochrane Circle, Morgan Hill, California

今すぐお問い合わせください

製品仕様

Made in USA:3-Axis Robot wafer transfer
Production Proven Equipment:Much better performance with Allwin21 new control technologi

タイトルまたは説明

The AW***5R single-wafer photoresist asher and descum is an automated tool designed as a flexible *3.*6MHz RF Parallel Plate plasma photoresist removal and descum system for high-volume wafer fabrication. The AW***5R is in direct response to manufacturers concerns for wafer uniformity, uptime, reliability and production-proven technology.
AW***5R Configuration:
       Main Frame with Circuit Breakers, Solenoid Valves
       Pentium Class PC with AW Software
       Keyboard, Mouse, USB SW backup, and Cables
       Chuck /w Heat, Pump Ring ,Lift Pins

â‘ **4 inch; â‘¡ **6 inch;â‘¢ **6 inch;â‘£ 6.**5 inch;â‘¤ 6.*5 inch

Center Aligner and Cassette Station

â‘ Two Dimensions â‘¡ Four Dimensions

       Anodized Reactor with Door
       Chamber Base plate with water sensor
       Base Plate and Reactor Ceramic Ring
       Base Plate and Chuck Ceramic Ring
       Upper and Lower Electrodes
       Quartz showerhead & Diffusion Disk
       Main Control and Distribution PCBs
       *-axis Integrated Robust Solid Robot
       RF Matching Network with PCBs
       *3.*6MHz RF Generator

â‘ **0W â‘¡ **0W

MFC /w In-line Filter and Solenoid Isolation Valve

â‘ One MFC; â‘¡ Two MFCs; â‘¢ Three MFCs

       AC/DC Box with Temperature Controller
       MKS Baratron with Isolation Valve
       Lamp Tower Alarm w/ Buzzer
       Throttle Valve
       Main Vacuum Valve
       Front EMO, Interlocks
       **-inch Touch Screen GUI
AW***5R Options:
       End-of-Process (EOP)
       GEM/SECS II (Software)
       Vacuum Pump
       Chiller for Chamber Base Plate

国:	USA
モデル番号:	AW-105R Plasma Asher Plasma Descum
离岸价格:	（交渉可能） Get Latest Price
ロケーション:	-
最低注文量の価格:	-
最低注文量:	-
パッケージの詳細:	Contact us by ***** for detail
納期:	-
供給能力:	-
支払いタイプ:	-
製品グループ :	-