Efem/Sorter

タイトルまたは説明

High Speed
**0 WPH with OCR reading
***0 WPH without OCR reading
High Reliability 
Robot Global Top Share (Yaskawa,hirata,Tazmo)
Key Components MCBF *5,**0,**0 cycles
Super Clean
Clean Class: ISO class1

The control technology and key components are all independently developed, achieving full localization. The equipment is equipped with wafer handling robots (ROBOT), fully automatic loading systems (Load port), SMIF, flip mechanisms, and fully automatic edge inspection aligners (PA) with visual OCR functions. Through Honghu's patented multi-specification wafer transfer solution, the equipment can not only be compatible with various sizes such as 4/6/8/*2, enabling rapid switching of conventional silicon-based wafers, but also can accurately identify non-silicon-based material wafers through continuous deep learning. Honghu equipment has been widely used in the field of silicon-based integrated circuit manufacturing and compound semiconductors such as SiC and GaN.