High Vacuum Angle Valve from SMC

Model: XLA**-M9NLA

Normally closed, Bellow sealed, Air-operated type,

With 2 auto switches:  Open & close positions are detected

• Temperature range: 5 to *0°C
• Pressure range: 1 x *0^*8 mbar to 1 bar (abs.)
• Bellows-sealed (Spring Bellow **6L)
• Valve plate seal: FPM (fluororubber)
• Leakage rate: 1.3 x *0^*9 mbar l/s (without permeation)
• Cycles to first maintenance: 2,**0,**0
• Cleaned and packaged suitable for cleanroom use
• Pneumatics: Normally closed
• Visible position indicator, equipped for position sender (see SMC accessories)
• Options: Other seal materials; aluminum housing: Heater to prevent vapor condensation, double-action pneumatics, integral control valve