SOI piezoresistive pressure sensitive chip

タイトルまたは説明

Characteristics :
Measuring range 0 ~ **0 kpa... ***0 kpa
Piezoresistive type bare chip
SOI structure
Absolute pressure or  gauge pressure form
Low temperature drift
Excellent stability, high cost performance
Constant voltage and constant current power supply can be choosed

Application:
TPMS sensor, MAP sensor, oil pressure test and other auto electronics field
Air compressor, electrical appliances and other civilian field
Water pump, fire control, diving, dam and other water pressure test
Petroleum, coal mine, high-speed rail, electric power and other industrial fields
All kinds of instruments and meters

Product overview:
This type of piezoresistive pressure sensitive chip completes processing by adopting 6 inches of MEMS production line, the pressure sensitive chip is composed of one elastic membrane and four resistors integrated on the film, four varistors form the structure of wheatstone bridge, bridge produces a voltage output signal which has a linear proportional relationship with the added pressure when pressure effects on the elastic membrane.
The chip adopts SOI structure, it can be used under the high temperature of **0 ℃, the chip size is 2.4 mm x 2.4 mm x 0.*2 mm.
Good linearity, repeatability and stability, zero and full scale temperature drift is small, excellent anti-jamming ability and antistatic ability, strong overload capacity, high sensitivity, convenient for users' output debugging adopting op-amp or integrated circuit.
Suitable for pressure sensors of oil filled isolation and various simple encapsulation.