タイトルまたは説明

The semiconductor spare part is an important accessory of semiconductor ceramics. The critical process of the semiconductor accessory shall be carried out in a clean environment. The spare parts of the semiconductor equipment shall be used in high temperature and vacuum environment with corrosive gases. The precision ceramic materials can maintain high stability in complex physical and chemical environment. The semiconductor ceramic plate is made of alumina ceramics with purity higher than *9.5%, and manufactured through cold isostatic pressure forming, high temperature sintering and precision grinding and polishing. It has superior resistance to wear, resistance to corrosion, low expansion factor, proper insulation, etc., which can meet the strict requirements of the semiconductor equipment for the spare parts.