タイトルまたは説明

Description of equipment function:

This equipment is suitable for the preparation of anti-corrosion, hard, decoration and other functional surface coating, set up four columns more than a total of *2 new arc target; New target arc arc spot speed faster, more arc spot energy density is reduced, reducing the arc spot on the melting of the coating material, can refine the coating, high ionization rate, and through the new arc target linear filtering, can partly filter out the larger particles of droplet, rough surface film density, increase the membrane layer surface finish; At present this kind of new type of tial target mainly use in the tool of high binding force for coating industry.

This equipment vacuum system configuration molecular pump + mechanical pump vacuum system; PLC + industrial man-machine interface, hands/automatic integrated operation mode and protection.

The main technical indicators:

Vacuum chamber inner cavity at the net size is **0 * **4 stainless steel vertical cylindrical H**0mm double-layer water before open the door, wall four columns *2 new filter arc source interface;

2 sets high vacuum system compound molecular pump FF**0/***0 + roots pump + straight league mechanical pump and digital display compound vacuum gauge a full range of high vacuum system;

Vacuum: extreme limit of 9.0 x ***5 pa; *2 hours after vacuum booster rate: *0 Pa or less;

Pumping speed pumping speed: from the atmosphere to the 5 x ***3 pa *5 min or less;

Artifacts revolution speed work-piece frame size: size phi **0 x H**8mm, 8 common rotation shaft workpiece frame, small bogie: phi **2 mm (*8) can be put on

Workpiece plane revolution speed 1 r/min ~ 5 r/min is adjustable;

       

Baking temperature tubular heater heating, heating power *0 kw, the heating temperature of workpiece: at room temperature to **0 + / - 1; Japanese island electric PID intelligent temperature control system of closed loop control, temperature control precision of plus or minus 2;

New type arc more target  **0 mm new magnetic filter arc ion source (including power) ***2 sets; Beam spot: phi **0 mm

Set aside three arc source interface;

Negative bias power supply *0 kw dc pulsed bias power supply, a ion assisted deposition film and cleaning;

Control gas mass flow control 3 road and a full range of metal gas pipeline; The computer control

Control interface hands/automatic integrated operation mode and protection.

Controlled by industrial computer, Windows XP operating system, software and PLC + industrial control

Alarm and protect equipped with cooling circulation water machine and is a full set of water cooling pipe system and water detection alarm protection system, such as, ion source water pump, open circuit anomalies in alarm and perform the corresponding protective measures,

Covers an area of length x width: 8 (square meters)

About *0 kw total power