タイトルまたは説明

Four Grades of  Ultra-pure Etchant/Cleanout Fluid/Oxidizer
    UPSS Grade  Single Metal Impurity less than 0.1ppb
                 The same level as SEMI Grade 4
                 Filter 0.2 micron particles
     UPS Grade  Single Metal Impurity less than 1ppb
                 The same level as SEMI Grade 3
                 Filter 0.2 micron particles
     UP Grade   Single Metal Impurity less than *0ppb
                 The same level as SEMI Grade 2
                 Filter 0.2 micron particles
     EL Grade    Single Metal Impurity less than **0ppb
                  The same level as SEMI Grade 1
                  Filter 0.2 micron particles