sputtering target

Description

Sputtering Target, Available Materials: Metal, Compound (Oxide, Fluoride, Boride, Carbide, Nitride, Sulfide, Selenide, Silicide, Telluride, Antimonide, Arsenide), Precious metal and alloys (Au, Pt, Pd, Ag, Ru, Ir, Rh, Os, IrMn, OsRu, AuGe and e.t.c), Rare earth materials, Mixtures and e.t.c

Available type:
Diameter: 1" (*5.4mm) to *8" (**7.2mm) ,  max. Single piece,  Size: Length: *9.9%, *9.*9% TREM: *9%
Zirconium  Zr *9.2%, *9.5%, *9.9%
Zinc  Zn *9.*9%

Precious metal and alloys Sputtering Target  ?????????
Available Shape:  Discs, plate, rod, tube, sheet, Delta, Rotatable, fan-shaped and all sputtering targets can be produced and supplied in any types on the request of customized specification
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Material Name Formula Purity
Silver  Ag  *9.*9%
Gold Au *9.*9%
Osmium Os *9.9%, *9.*5%
Ruthenium  Ru  *9.*5%
Platinum Pt *9.*9%
Palladium Pd *9.*5%
Rhodium Rh *9.*5%
Silver-Copper Ag-Cu *9.*9%
Silver-Zinc Ag-Zn *9.*9%
Silver-Indium Ag-In *9.*9%
Gold-Nickel Au-Ni *9.*9%
Gold-Copper Au-Cu *9.*9%
Gold-Zinc Au-Zn *9.*9%
Gold-Tin Au-Sn *9.*9%
Gold-Germanium Au-Ge *9.*9%, *9.**9%
Gold-Cobalt Au-Co *9.*5%
Osmium-Iridium Os-Ir *9.*5%
Osmium-Rhenium Os-Re *9.*5%
Osmium-Tungsten Os-W *9.9%
Osmium-Ruthenium Os-Ru *9.*5%
Palladium-Silver Pd-Ag *9.*9%
Palladium-Iron Pd-Fe *9.9%
Palladium-Aluminum Pd-Al *9.*9%
Palladium-Copper Pd-Cu *9.*9%
Platinum-Iron Pt-Fe *9.9%
Platinum-Cobalt Pt-Co *9.9%
Ruthenium-Chromium-Titanium Ru-Cr-Ti *9.9%
Ruthenium-Tantalum Ru-Ta *9.9%
Iridium-Manganese Ir-Mn *9.9%
 
Compound Ceramic Sputtering Target  ???????
Oxide Ceramic Target  ???????
Available Shape:  Discs, plate, rod, tube, sheet, Delta, Rotatable, fan-shaped and all sputtering targets can be produced and supplied in any types on the request of customized specification
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Aluminum Oxide, Al2O3 Antimony Oxide, Sb2O3 Bismuth Oxide, Bi2O3
Cerium Oxide, CeO2 Chromium Oxide,CrO, Cr2O3 Copper Oxide, CuO
Cobalt Oxide, CoO, Co3O4, Co2O3 Dysprosium Oxide, Dy2O3 Erbium Oxide, Er2O3
Europium Oxide, Eu2O3 Gadolinium Oxide, Gd2O3 Germanium Oxide, GeO2
Hafnium Oxide, HfO2 Holmium Oxide , Ho2O3  Indium Oxide, In2O3
Iridium Oxide, IrO2 Iron Oxide , Fe2O3, Fe3O4 Gallium Oxide, Ga2O3
Lead Oxide, PbO   Magnesium Oxide, MgO  Molybdenum Oxide, MoO3
Manganese Oxide, MnO, MnO2 Neodymium Oxide, Nd2O3 Niobium Pentoxide, Nb2O5, Nb2Ox
Nickel Oxide, NiO  Praseodymium Oxide, Pr6O*1 Samarium Oxide , Sm2O3
Scandium Oxide, Sc2O3 Silicon Monoxide, SiO  Silicon Dioxide, SiO2
Tantalum Pentoxide, Ta2O5 Terbium Oxide, Tb4O7   Thulium Oxide, Tm2O3
Titanium Oxide, TiO, TiO2, Ti2O3, Ti3O5 Vanadium Pentoxide , V2O5, VO2 Yttrium Oxide, Y2O3 
Ytterbium Oxide , Yb2O3  Zinc Oxide , ZnO  Zirconium oxide, ZrO2
Tin Oxide, SnO, SnO2 Ruthenium Oxide, RuO2 Boron Oxide, B2O3
Lanthanum Oxide, La2O3  

Mixtures Ceramic Targets  ???????
Available Shape:  Discs, plate, rod, tube, sheet, Delta, Rotatable, fan-shaped and all sputtering targets can be produced and supplied in any types on the request of customized specification
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Zinc Aluminum Oxide, AZO, Al2O*-ZnO, ZnO-Al  Indium Tin Oxide, In2O*-SnO2, ITO 
Indium Zinc Oxide, In2O*-ZnO, IZO  Indium Gallium Zinc Oxide, IGZO , In2O3+Ga2O3+ZnO
Indium Gallium Oxide, In2O*-Ga2O3 Cr doped Silicon Monoxide, Cr-SiO
Lanthanum Aluminate, LaAl2O3  Antimony Tin Dioxide, Sb:SnO, ATO
Lead Zirconate-Titanate, PZT , PbZrO3 + PbTiO3 Lanthanum Titanate, LaTiO3
Tungsten Oxide doped Li, WO*-Li LSMO, La0.*7Sr0.*3MnO3  
Lead Zirconate , PbZrO3 Lead Zirconate , PbZrO3
Lead Titanate, PbTiO3   LiNi0.*3Mn0.*3Co0.*3O2 (NMC)
Praseodymium Titanate, PrTiO3 LiMnO2
Strontium Titanate , SrTiO3 LiNi0.5Co0.5O2
Barium Titanate , BaTiO3  LiCoO2
Yttrium Barium Copper Oxide, YBCO LiMn0.5Co0.5O2
Gadolinium Barium Copper Oxide, GdBaCuO   LiNi0.5Mn1.5O4
ZrO*-Y2O3 stabilized , YSZ  LiNi0.5Mn0.5CoO2
ZrO*-SiO2, ZrSiO4 Ga2O3 doped ZnO , GZO 
LiFePO4  TiO*-Cr2O3
DyFeO3     BiDyFeGaO*2
CoFe2O4 NiFe2O4
BiFeO3  HfSiO4
SrRuO3  Pb-La-ZrTiO3, PLZT

Fluoride Ceramic sputtering target  ?????????
Available Shape:  Discs, plate, rod, tube, sheet, Delta, Rotatable, fan-shaped and all sputtering targets can be produced and supplied in any types on the request of customized specification
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Material Name  Formula Material Name  Formula
Aluminum Fluoride   AlF3 Lithium Fluoride LiF
Ytterbium Fluoride  YbF3 Cerium Fluoride CeF3
Yttrium Fluoride  YF3 Calcium Fluoride, CaF2
Barium Fluoride  BaF2 Erbium Fluoride  ErF3
Magnesium Fluoride  MgF2 Lanthanum Fluoride LaF3
Nodium Fluoride  NaF Lead Fluoride PbF3

Boride Ceramic sputtering target    ?????????
Available Shape:  Discs, plate, rod, tube, sheet, Delta, Rotatable, fan-shaped and all sputtering targets can be produced and supplied in any types on the request of customized specification
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Material Name Formula Material Name Formula
Cerium Boride CeB6 Neodymium Boride NdB6
Chromium Boride CrB2 Titanium Boride TiB2
Copper Boride CuB2 Tantalum Boride TaB2
Dysprosium Boride DyB6 Tungsten Boride W2B5, WB
Erbium Boride ErB6 Vanadium Boride V2B
Gadolinium Boride GdB6 Zirconium Boride ZrB2
Holium Boride HoB6 Ytterbium Boride YbB6
Hafnium Boride HfB2 Yttrium Boride YB6
Lanthanum Boride LaB6 Thulium Boride TmB6
Scandium Boride ScB6 Terbium Boride TbB6

Carbide Ceramic sputtering target   ?????????
Available Shape:  Discs, plate, rod, tube, sheet, Delta, Rotatable, fan-shaped and all sputtering targets can be produced and supplied in any types on the request of customized specification
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Material Name  Formula Material Name  Formula
Chromium Carbide Cr2C3, CrC Boron Carbide      B4C
Hafnium Carbide HfC Molybdenum Carbide  Mo2C
Niobium Carbide NbC Titanium Carbon Nitride TiCN
Silicide Carbide SiC Tungsten Carbide Doped with Nickel  WC+Ni
Tantalum Carbide TaC Tungsten Carbide Doped with Cobal WC+Co
Titanium Carbide TiC Tungsten Carbide WC
Vanadium Carbide VC Tantalum Hafnium Carbide Ta4HfC5
Zirconium Carbide ZrC  

Nitride Ceramic sputtering target   ?????????
Available Shape:  Discs, plate, rod, tube, sheet, Delta, Rotatable, fan-shaped and all sputtering targets can be produced and supplied in any types on the request of customized specification
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Material Name  Formula Material Name  Formula
Aluminum Nitride AlN Boron Nitride BN
Hafnium Nitride HfN Niobium Niride NbN
Silicom Nitride Si3N4 Tantalum Nitride TaN
Titanium Carbon nitride  TiCN Titanium Nitride TiN
Vanadium Nitride VN  Zirconium Nitride ZrN

        
Sulfide Ceramic sputtering target  ?????????
Available Shape:  Discs, plate, rod, tube, sheet, Delta, Rotatable, fan-shaped and all sputtering targets can be produced and supplied in any types on the request of customized specification
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Material Name  Formula Material Name  Formula
Cadmium Sulfide CdS Copper Sulfide CuS,Cu2S
Indium Sulfide In2S3  Iron Sulfide FeS, FeS2
Lead Sulfide PbS Tungsten Sulfide WS2
Molybdenum Sulfide MoS2 Silver Sulfide  AgS. Ag2S
Tin Sulfide SnS, SnS2 Zinc Sulfide ZnS

Silicide Ceramic sputtering target   ?????????
Available Shape:  Discs, plate, rod, tube, sheet, Delta, Rotatable, fan-shaped and all sputtering targets can be produced and supplied in any types on the request of customized specification
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Material Name  Formula Material Name  Formula
Chromium Silicide CrSi2  Cobalt Silicide Co3Si
Hafnium Silicide HfSi2  Molybdenum Silicide MoSi2, Mo5Si3
Nickel Silicide NiSi Niobium Silicide Nb5Si3, NbSi2
Tantalum Silicide Ta5Si3, TaSi2 Titanium Silicide Ti5Si3, TiSi2
Tungsten Silicide WSi2 Vanadium Silicide V3Si, VSi2
Zirconium Silicide ZrSi2  

  
 
Selenide Ceramic sputtering target  ?????????
Available Shape:  Discs, plate, rod, tube, sheet, Delta, Rotatable, fan-shaped and all sputtering targets can be produced and supplied in any types on the request of customized specification
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Material Name  Formula Material Name  Formula
Cadmium Selenide CdSe  Bismuth Selenide Bi2Se3
Gallium Selenide Ga2Se3  Copper Selenide CuSe, Cu2Se
Geranium Selenide GeSe Arsenic Selenide As2Se3
Indium Selenide In2Se3 Lead Selenide PbSe
Zinc Selenide ZnSe  

     
Antimonide sputtering target  ?????????
Available Shape:  Discs, plate, rod, tube, sheet, Delta, Rotatable, fan-shaped and all sputtering targets can be produced and supplied in any types on the request of customized specification
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Material Name  Formula
Indium Antimonide InSb
Gallium Antimonide GaSb
Nickel Antimonide  NiSb

Arsenide sputtering target   ?????????
Available Shape:  Discs, plate, rod, tube, sheet, Delta, Rotatable, fan-shaped and all sputtering targets can be produced and supplied in any types on the request of customized specification
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Material Name  Formula
Indium Arsenide InAs
Tin Arsenide SnAs
Gallium Arsenide GaAs

Telluride sputtering target   ?????????
Available Shape:  Discs, plate, rod, tube, sheet, Delta, Rotatable, fan-shaped and all sputtering targets can be produced and supplied in any types on the request of customized specification
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Material Name  Formula Material Name  Formula
Arsenic Telluride As2Te3 Antimony Telluride SbTe, Sb2Te3
Bismuth Telluride Bi2Te3, BiTe Bismuth Antimony Telluride Bi-Sb-Te
Cadmium Telluride CdTe  Copper Telluride CuTe, Cu2Te
Gallium Telluride GaTe  Geranium Telluride GeTe
Geranium Antimony Telluride Ge-Sb-Te  Lead Telluride PbTe
Tin Telluride SnTe Zinc Telluride ZnTe
Manganese Telluride MnTe2  

  
Alloy Sputtering Target  ????????
Available Shape:  Discs, plate, rod, tube, sheet, Delta, Rotatable, fan-shaped and all sputtering targets can be produced and supplied in any types on the request of customized specification
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Composition Composition Composition Composition
Al-Ag Cu-In-Ga-Se Ni-Ti W-B
Al-Si-Cu Cu-Ga Ni-Mn V-W
Al-Nd Cu-Ag Ni-Fe V-Al
Al-Sc Cu-In Ni-Cr V-Mo
Al-Cu  Cu-In-S-Se Ni-V  Y-Hf
Al-Ni Cr-Si Ni-Cr-Al-Y Y-Fe
Al-Cr Cr-Ni Sm-Fe  Zn-Mg
Al-Ti  Gd-Fe Sn-Bi Zn-Al
Al-Si Ge-Te Tb-Fe Zn-Sn
Al-Mg Hf-Fe Ta-Ru  Zr-Y
Al-Hf Hf-Y Ta-Nb Ni-Cr-Si
Al-Ta In-Zn Ta-W Co-Ni
 Al-Mo In-Sb Ti-Zr Co-B
Al-Y In-Sn Ti-Si  Nb-Ta
Co-Fe-Si Mn-Fe  Ti-Al Nb-Zr
Co-Cr Mo-Ta Ti-Al-Nb W-Si
Co-Fe-Si-B Mo-Nb  Ti-W W-Al
Co-Sm Mg-Cu  Ti-Mo  Ti-Co
Co-Fe Nb-Ti  W-Ti  Ge-Sb-Te

 
Can be produced and supplied in any composition on the request of customized specification