Description

TMFC Thermal Mass Flow Controller Specifictions • Highly Accuracy at Low Flow • Fast Response(≦1.0) • Wide Pressure Range Available(***0 PSIG) • No Leakage • No Temperature or Pressure Required • Connection compatible • High stable removable sensor • Corrosion resistance Value • Excellent Linearity • Excellent long term Stability • Modular design • Compact Flow Control System Model TMFC*0V TMFC*0A TMFC*0V TMFC*0A Flow Range(N2) *0sccm~*0SLM *0sccm~*0SLM *0scc~*0SLM *0scc~*0SLM Response Time ≦1.0 sec Accuracy ±1.0 % FS Repeatability ±0.*5 % FS Proof Pressure ***0 PSIG Leak rate 1 x ***9 *****/sec or less Working temperature Range 0~*0℃ Materials of parts in contact w/gases Body:SUS**6 Valve seat:Vitionâ„¢(Option Buraâ„¢ or Kalrezâ„¢ or Teflonâ„¢) Joint Standard:1/4 compression Option: 1/8 compression, 1/4 VCRâ„¢, 3/8 Compression, VCRâ„¢ Electrical connections Dsub **-pin male connector per standards Flow rate input signals 0~5 Vdc 4~*0mA 0~5 Vdc 4~*0mA Flow rate output signals 0~5 Vdc 4~*0mA 0~5 Vdc 4~*0mA required power supply ï&frac*4;‹*5~*8 Vdc/**0mA