FOB Price
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China
連絡先担当者 Mr. Bert
yuhua district,huaian road no96, Shijiazhuang, Hebei
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Material |
Fused silica/Borofloat/B**0 etc |
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spec |
unit |
3" |
4" |
5" |
6" |
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Diameter/size(or
square) |
mm |
*6.2 | **0 | **5 | **0 | |
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Tol(±) |
mm |
0.*5 | 0.5 | 0.5 | 0.5 | |
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Thickness |
mm |
0.*0mm or more |
0.*8mm or more |
0.*0mm or more |
0.*0mm or more |
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Primary reference
flat |
mm |
*2mm or customized |
*2.5mm or customized |
*2.5mm or customized |
*7.5mm or customized |
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LTV (5mmx5mm) |
µm |
< 2 |
< 2 |
< 2 |
< 2 |
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TTV |
µm |
< 8 |
< *0 |
< *5 |
< *0 |
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Bow |
µm |
±*0 |
±*5 |
±*0 |
±*0 |
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Warp |
µm |
≤ *0 |
≤ *0 |
≤ *0 |
≤ *0 |
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PLTV |
% |
≥*0%(5mm*5mm) |
≥*0%(5mm*5mm) |
≥*0%(5mm*5mm) |
≥*0%(5mm*5mm) |
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Edge Rounding |
mm |
Compliant with SEMI M1.2
Standard/refer to IEC****6 |
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Surface Type |
　 |
Single Side Polished /Double Sides
Polished |
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Polished side Ra |
nm |
≤1 |
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Back Side Criteria |
µm |
general 0.**0.5 or as
customized |
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Appearance |
Contamination, |
None |
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Particles
ï¿ >0.3 µ
m |
<= *0 |
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Saw Marks,
striations |
None |
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Scratch |
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