FOB Price
Get Latest Price|
Minimum Order
Place of Origin:
-
Price for Minimum Order:
-
Minimum Order Quantity:
-
Packaging Detail:
-
Delivery Time:
-
Supplying Ability:
-
Payment Type:
T/T
China
連絡先担当者 Mr. Bert
yuhua district,huaian road no96, Shijiazhuang, Hebei
Material |
Fused silica/Borofloat/B**0
etc |
|||||
spec |
unit |
3" |
4" |
5" |
6" |
|
Diameter/size(or square) |
mm |
*6.2 | **0 | **5 | **0 | |
Tol(±) |
mm |
0.*5 | 0.5 | 0.5 | 0.5 | |
Thickness |
mm |
0.*0mm or
more |
0.*8mm or
more |
0.*0mm or
more |
0.*0mm or more |
|
Primary reference flat |
mm |
*2mm or
customized |
*2.5mm or
customized |
*2.5mm or
customized |
*7.5mm or customized |
|
LTV (5mmx5mm) |
µm |
<
2 |
<
2 |
<
2 |
< 2 |
|
TTV |
µm |
<
8 |
<
*0 |
<
*5 |
< *0 |
|
Bow |
µm |
±*0 |
±*5 |
±*0 |
±*0 |
|
Warp |
µm |
≤
*0 |
≤
*0 |
≤
*0 |
≤ *0 |
|
PLTV |
% |
≥*0%(5mm*5mm) |
≥*0%(5mm*5mm) |
≥*0%(5mm*5mm) |
≥*0%(5mm*5mm) |
|
Edge Rounding |
mm |
Compliant with SEMI M1.2 Standard/refer to
IEC****6 |
||||
Surface Type |
  | Single Side Polished /Double Sides
Polished |
||||
Polished side Ra |
nm |
≤1 |
||||
Back Side Criteria |
µm |
general 0.**0.5 or as
customized |
||||
Appearance |
Contamination, |
None |
||||
Particles ï¿ >0.3 µ m |
<=
*0 |
|||||
Saw Marks, striations |
None |
|||||
Scratch |
None |
|||||
Cracks, crowsfeet, saw marks,
stains |
None |