Description

The sensing element is comprised of a sensing chip and an integrated heater
formed on a silicon substrate using MEMS technology, and a metal-oxide
semiconductor layer formed on the sensing chip. The device is housed in a
surface-mount ceramic package. Due to miniaturization of the sensing chip,
TGS ***0 requires a heater power consumption of only *5mW, and is suitable
for low-power equipment and battery-operated instruments. In the presence of
detectable gas, sensor conductivity increases depending on gas concentration
in the air. A simple electrical circuit can convert the change in conductivity to
an output signal which corresponds to the gas concentration.
The TGS ***0 has high sensitivity to low concentrations of gaseous air
contaminants such as cigarette smoke and cooking odors. By utilizing the
change ratio of sensor resistance from the resistance in clean air as relative
response, human perception of air contaminants can be simulated and practical
air quality control can be achieved.