Description
In ***1, Shenyang Academy of Instrumentation Science started to
research and manufacture silicon piezoresistive wafers. With
excellent technology and well educated employees, we become the
market leader in China for piezoresistive die.
We establish our reputation for cost-effective and quality. The
pressure dies have been employed in pressure transducers widely in
the world.
Features:
Self-intellectual property and manufacture workmanship silicon
Micromachining
4"Silicon wafer workmanship flow and controllable workmanship in
batch production, various ranges
Tiny size structure, high consistency and economical wholesale
price
High accuracylong stability and reliability
Specifications
*1
Nominal Scale *5KPa,**0KPa,**0KPa,
**0KPa,1MPa,1.6MPa,2.5MPa,6MPa,
*0MPa,*5MPa,*0MPa,*0MPa
*2 &*;*&*;&*;
&*;&*;&*;&*;&*;&*;&*;&*;&*;&*;&*;&*;&*;&*;&*;&*;
≤*@********************p; Span Output ≥*0mA(≤*5KPa) ;
≥*0mV (other scale)
*4 Nonlinearity ±0.*5%F.S.
*5 Power Supply 1 mADC
(typical), 5V (optional)
*6 Zero Temperature Coefficient
±0.1%F.S./ ºC
*7 Sensitivity Temperature
Coefficient ±0.1%F.S./ ºC (≤*5KPa)
±0.*5%F.S./ ºC (other scale)
*8 Overload Capacity 2 times
scale(≤*0MPa);1.5times scale(>*0MPa)
*9 Bridge Resistance 5 (1±*0%)
KΩ
*0 Operating Temperature **5ºC
~ ***0ºC
*1 Short Term Stability
±0.*5%F.S./8h
*2 Chip Size(um)
***0×***0 ***0×***0
Notes 1.Calculating method of nonlinearity is the
Least Squares Method.
2.Short Term Stability is tested under *5ºC,5VDC.
3.Other results are attained with the reference temperature
*5ºC,1mADC.
4.Silicon wafer thickness c=**0um,glass thickness d=**0um
