タイトルまたは説明

***0E MFC accurately measures and controls gas flows. The heart of the system is the removable flow sensor which prouduces an electrical output signal linear with flow rate used for indicating, recording, and/or control purposes. It eliminates the need for continuous monitoring and readjustment of gas pressures to provide a stable gas flow.

Type: Metal Seal Controller
Model: ***0EM Series
Full Scale Capacity: 3 ccm **0 lpm,  *****0 lpm (**0 lpm H2)
Accuracy: 1% FS
Max. Pressure psig(bar) ***0 (**0)
Input/ Output: **5 Vdc or ***0 mA
Power supply: +/- *5Vdc