タイトルまたは説明

The ***0 series utilizes a Micro Electro Mechanical System based thermal sensor. Similar to typical thermal sensors, it measures a change in temperature to determine mass flow rate. The difference is that gas flows directly across the sensor, achieving extremely fast response times.

Type:  Elastomer Seal Controller/ Meter
Model: ***0 Series
Capacity: *0 sccm **0 slpm
Accuracy: +/- 1% of FS, or +/- 3% FS
Max. Pressure psig(bar) **0 (*0)
Input/Output: **5 Vdc, ***0mA
Power Supply: ****4 Vdc